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发明名称
METHOD AND APPARATUS FOR ACTUATION OF A TWO-AXIS MEMS DEVICE USING THREE ACTUATION ELEMENTS
摘要
申请公布号
AU2003216497(A1)
申请公布日期
2003.09.22
申请号
AU20030216497
申请日期
2003.03.03
申请人
GLIMMERGLASS NETWORKS, INC.
发明人
ANDRES FERNANDEZ;WILLIAM, C. DICKSON
分类号
G02B26/08;B81B3/00;G02B;G02B26/10;H02N1/00
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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