| 摘要 |
PROBLEM TO BE SOLVED: To alternately and rapidly detect a mark on a substrate by alignment sensors of different detecting types from each other. SOLUTION: A mark-sensing unit senses the mark formed on the substrate, without the intermediary of a projection lens for projecting a pattern on a mask on the substrate. The sensing unit comprises an optical system, provided out of a projection optical path of a projection optical system, a first sensing system for sensing the mark on the substrate via the optical system by a first sensing method and processing a first waveform signal generated, corresponding to the mark and obtaining position information of the mark, and a second sensing system for sensing the mark on the substrate via the optical system by a second sensing method different from the first sensing method, processing a second waveform signal of a waveform different from the first waveform signal as the waveform generated, corresponding to the mark and obtaining the position information of the mark. |
