发明名称
摘要 PURPOSE: To obtain a compsn. not causing problem on work efficiency or safety and excellent in removing performance and corrosion preventiveness by incorporating N-alkylalkanolamine and at least one of 1,3-dimethyl-2-imidazolidinone, etc. CONSTITUTION: This compsn. contains N-alkylalkanolamine as an essential component and at least one of 1,3-dimethyl-2-imidazolidinone and diethylene glycol monoalkyl ether for improving thermal stability or further contains one or more kinds of compounding agents selected from among an arom. hydroxy compd., a carboxyl group-contg. org. compd., its anhydride and a triazole compd. Since the compounding agents are blended, removing performance, removal stability and corrosion preventiveness, especially corrosion preventiveness at the time of washing and rinsing are considerably improved. Other additives such as a surfactant may be added. Removing action is stably maintained and a high quality semiconductor device or liq. crystal panel device can be produced.
申请公布号 JP3449650(B2) 申请公布日期 2003.09.22
申请号 JP19940246711 申请日期 1994.09.16
申请人 发明人
分类号 G03F7/42;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
代理机构 代理人
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