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发明名称
DEHYDRATION DRYING METHOD AND APPARATUS, AND SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
AU2003210012(A1)
申请公布日期
2003.09.22
申请号
AU20030210012
申请日期
2003.03.05
申请人
EBARA CORPORATION
发明人
KOJI ATO;TETSUJI TOGAWA
分类号
B65D85/86;F26B5/04;F26B5/08;F26B25/06;H01L21/00;H01L21/304;H01L21/306;H01L21/3105;H01L21/316;(IPC1-7):H01L21/304
主分类号
B65D85/86
代理机构
代理人
主权项
地址
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