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发明名称
摘要
申请公布号
JP3450438(B2)
申请公布日期
2003.09.22
申请号
JP19940148397
申请日期
1994.06.30
申请人
发明人
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
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