摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder capable of restraining strain of a substrate, by holding the substantially rectangular substrate in a substantially horizontal state. SOLUTION: A robot for holding the substrates 2 and 4 in a substantially horizontal state, has two arms for supporting an under surface of the substrates. In this case, the substrates 2 and 4 generate deflection with support positions R<SB>1</SB>and R<SB>2</SB>by the two arms as apexes. For minimizing this deflection, an arm position is set so as to support the substrates at positions where the whole parts of the substrates except for the support positions at least downwardly deflects. COPYRIGHT: (C)2006,JPO&NCIPI
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