FIELD EMISSION TYPE ELECTRON SOURCE AND DRIVING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a field emission type electron source and a driving method so that the emission of electrons can be controlled well and the electrons can be emitted uniformly from a planate cathode surface.

SOLUTION: In an electron source 10, a control electrode 18 is formed on a backside plate 12. An insulating layer 20 is formed around the control electrode 18. A cathode 14 is formed in proximity of the control electrode 18 on the insulating layer 20, and the insulating layer 26 is formed on the insulating layer 20 around the cathode 14. A gate 16 provided with a round shaped opening 30 exposing the control electrode 18 and the electrode 14 is formed on the insulating layer 26. Electrons are emitted from the cathode 14 by having high voltage applied in between the cathode 14 and an anode 38. The emitting of electrons from the cathode 14 is stopped with the high electric field in the vicinity of the cathode 14 is eased by having the potential of the gate 16 and the control electrode 18 to be the same potential which is lower than the potential of the cathode 14.

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