| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stage device for precise processing, capable of eliminating reciprocating operation likely to generate when a movable table stops moving and attaining smoothing of table movement, and reducing the size of the device. <P>SOLUTION: This stage device for precise processing comprises a movable table 1 arranged so as to be movable in an arbitrary direction on the same surface, a table retaining mechanism 2 which permits the movable table 1 to move and retains the movable table 1 with original position returning power added, and electromagnetic drive means 4, 34 which energize locomotion on the movable table 1. The electromagnetic drive means 4, 34 consist of a plurality of driven magnets 6 mounted on the movable table 1, a driving coil 7 which has coil pieces arranged so as to face the respective driven magnets 6 and energizes electromagnetic drive force on the movable table 1 via the driven magnets 6, and a means of retaining the drive coil 7. A braking plate is provided on the movable table 1 to ensure smooth operation of the movable table 1. <P>COPYRIGHT: (C)2003,JPO</p> |
