METHOD FOR MANUFACTURING MAGNETIC DISK

摘要

PROBLEM TO BE SOLVED: To decrease microdefects on a surface of multilayered films of a magnetic disk and to decrease intra-surface distributions of coercive force by the stability and uniformity of plasma. SOLUTION: The plasma is made stable and uniform by forming a shielding structure into a hermetic structure by using a sputtering electrode of a rotary magnetron system, by which the intra-surface distributions of the Pt atoms deposited on a disk substrate can be decreased. The microdust on the surfaces of the multilayered films occurring in the dust produced from the deposited films and the defects of the multilayered films can be decreased by forming the shield into the hermetic structure. COPYRIGHT: (C)2003,JPO