| 摘要 |
PROBLEM TO BE SOLVED: To provide heat treatment equipment for a glass substrate reducing heat loss from the heat treatment equipment, consequently increasing energy efficiency of the equipment, reducing temperature nonuniformity in a heating chamber, and stabilizing atmosphere in a clean room in the circumference of the equipment. SOLUTION: This heat treatment equipment is provided with the heating chamber 3 performing the heat treatment of the glass substrate 7 and characterized in having an attachment chamber 2 installed side by side with the heating chamber and letting the glass substrate wait for a prescribed time. COPYRIGHT: (C)2003,JPO
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