| 摘要 |
PURPOSE: A film bulk acoustic resonator(FBAR) filter and a fabrication method thereof are provided to improve band pass characteristics of the FBAR filter and to realize one chip integration by a MMIC(Monolithic Microwave Integrated Circuit) process without using an external individual device. CONSTITUTION: The first resonant part(61) is formed by connecting a number of film bulk acoustic resonators(FBAR)(61a,61b,61c) having the first resonant frequency serially. The second resonator part(62) is formed with a number of FBARs(62a,62b) connected in parallel with the FBARs of the first resonant part, and has the second resonant frequency. And the third resonant part(63) has the first resonant frequency, and is formed with a number of FBARs(63a,63b) connected in parallel with the FBARs of the first resonant part. |
