PROCESS TUBE SUPPORT SLEEVE WITH CIRCUMFERENTIAL CHANNELS,申请号KR20030016218-传众专利搜索

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发明名称	PROCESS TUBE SUPPORT SLEEVE WITH CIRCUMFERENTIAL CHANNELS
摘要
申请公布号	KR20030074479(A)	申请公布日期	2003.09.19
申请号	KR20030016218	申请日期	2003.03.14
申请人		发明人
分类号	H01L21/22;H01L21/00;H01L21/205;H01L21/324	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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