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发明名称
PLASMA APPARATUS AND PRODUCTION METHOD THEREOF
摘要
申请公布号
KR20030074782(A)
申请公布日期
2003.09.19
申请号
KR20037010301
申请日期
2003.08.05
申请人
发明人
分类号
H01L21/3065;H05H1/46;B01J19/08;H01J37/32;H01L21/302
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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