| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an actuator device, which enhances reliability by surely insulating a lower electrode from pull-out wiring and which reduces manufacturing costs, the actuator device, and a liquid jet head and a liquid jet apparatus. SOLUTION: The actuator device is manufactured through: a step of forming a diaphragm, at least of which the uppermost layer is composed of an insulator film 55, on one side of a substrate 10; a step of forming the lower electrode 60, a piezoelectric material layer 70 and an upper electrode 80 in a laminated manner on the insulator film 55 of the diaphragm; a step of forming a piezoelectric element 300 by continuously dry-etching the lower electrode 60, the piezoelectric material layer 70 and the upper electrode 80, and of depositing a removed insulating material to at least the end surface of the lower electrode 60 on side surface of the piezoelectric element 300 so as to form a redeposited film 130 for coating the end surface, by concurrently dry-etching at least a surface of the insulator film 55; and a step of forming the pull-out wiring 90 which is pulled out onto the diaphragm from the upper electrode 80 of the piezoelectric element 300 via the top surface of the redeposited film 130. COPYRIGHT: (C)2007,JPO&INPIT
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