| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet discharging head having a high driving performance and a high durability, and to provide a manufacturing method which can manufacture the liquid droplet discharging head of the high driving performance without damaging a confronted electrode. SOLUTION: This liquid droplet discharging head comprises a cavity board 11 on which a vibrating plate 14 is formed, the confronted electrode 18 which is confronted with the vibrating plate 14 with a gap, and drives the vibrating plate 14 by an electrostatic force, and an insulator membrane 31 which is formed on the surface of the cavity board 11 on the side being confronted with the confronted electrode 18. Opening sections 31a and 31b are provided on the insulating membrane 31. A through hole 27 for sealing which seals the gap is provided on the cavity board 11. The insulating membrane 31 consists of a metal oxide, or a metal nitride. COPYRIGHT: (C)2007,JPO&INPIT
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