| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic electroluminescent element in which pretreatment of film forming process of a substrate with electrodes is available without reducing the characteristics of the organic electroluminescent element. <P>SOLUTION: The substrate 18 with electrodes consists of a substrate portion of a synthetic resin and transparent electrodes. While carrying out plasma processing before coating of an organic layer, heat treatment of about 200°C order or less is performed to this substrate 18 with electrodes by a heater 24. Plasma processing is performed under which atmosphere of (A) mixed gas of oxygen and any one of nitrogen, argon, helium, neon, or xenon, of which the oxygen concentration is 5% or less, (B) mixed gas of oxygen and any one of 4-fluorocarbon, 6-fluoroethane, 8-fluoropropane, or octafluorocyclobutane, or (C) independent gas of nitrogen, argon, helium, neon, xenon, carbon monoxide, carbon dioxide, nitrogen monoxide, or nitrous oxide. <P>COPYRIGHT: (C)2003,JPO |
