| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that a conventional surface plasmon resonance sensor of this type has required a light source, a spectroscope, etc., at measurements to require a relatively large size and cause a high price and required expert knowledge for measurements to lower a general-purpose property. SOLUTION: This method for manufacturing a surface plasmon resonance sensor 1 comprises: a first process for forming a light receiving element 4 and a circuit part 3 on a semiconductor substrate 2; a second process for forming a plurality of LEDs 5 having different wavelengths on the substrate 2 by a MOCVD method; and a third process for making a transparent, optically reactive, thermosetting resin adhere between the LEDs 5 and the light receiving element 4 by a photolithography means, heating, melting, and setting the optically reactive, thermosetting resin in a hydrophobic liquid of the approximately same specific gravity with the surface of the semiconductor substrate directed downward, and forming a sensor part 10 at a required part. Therefore, it is possible to integrally form the sensor part on the semiconductor substrate 2 with a light source and a circuit part, to eliminate the need for external apparatuses, and to solve the problems. COPYRIGHT: (C)2003,JPO
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