| 摘要 |
PROBLEM TO BE SOLVED: To provide a movable structure for a micromachine element with which stress produced inside an elastic member is alleviated, and the occurrence of abnormal deformation of the elastic member is prevented. SOLUTION: An optical deflection element includes the movable structure and a substrate 132 supporting the movable structure. The movable structure comprises an inside movable plate 112, an outside movable plate 116 surrounding the inside movable plate 112, a pair of torsion springs 114 to connect the inside movable plate 112 with the outside movable plate 116, a pair of supports 120 positioned outside the outside movable plate 116, and a pair of torsion springs 118 to connect the supports 120 with the outside movable plate 116. Both of the inside torsion springs 114 and the outside torsion springs 118 have a mesh structure at least partially. For example, the entirety of the inside torsion springs 114 and the outside torsion springs 118 comprise the mesh structure, or the inside torsion springs 114 and the outside torsion springs 118 have the mesh structure partially. COPYRIGHT: (C)2003,JPO
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