| 摘要 |
PROBLEM TO BE SOLVED: To perform precise carrying by detecting the deviation of a carrying position just before a final stage to be corrected. SOLUTION: A vacuum treatment device is provided with: vacuum treatment chambers 30a and 30b for performing prescribed treatment to a specimen carried in at a prescribed position; an in-atmosphere carrying device 7 provided in the atmosphere and carrying the specimen in the atmosphere to a vacuum carrying device 10; an in-vacuum carrying device 10 provided in a vacuum carrying chamber 2 connecting the atmosphere and the vacuum treatment chambers 30a and 30b, and carrying the specimen received from the in- atmosphere carrying device up to the prescribed position of the vacuum treatment chamber; and specimen position detection devices 11a, 11b, 11c and 11d provided in the neighborhood of the carrying-in path of the treatment chamber and detecting the position deviation of a carried-in specimen. COPYRIGHT: (C)2003,JPO |
