| 摘要 |
PURPOSE: A field emission device and a method for manufacturing the same are provided to prevent a breakdown of insulation film by forming an upper electrode from the mixture of a metal and a material of the insulation layer. CONSTITUTION: A field emission device comprises a lower electrode(31) formed on a lower substrate(30); an insulation layer(32) formed on the lower substrate; a tunnel insulation film(33) formed on the center of the lower electrode; a lower electrode pad layer formed on the insulation layer and the tunnel insulation film; a lower bus electrode formed on the lower electrode pad layer; and an upper electrode formed on the tunnel insulation film and made of a mixture of a metal and a material of the insulation film.
|
