DEVICE AND METHOD FOR HANDLING WAFER

摘要

PROBLEM TO BE SOLVED: To regulate a drawing position by surely drawing a wafer. SOLUTION: A wafer handling means 6 which handles the wafer 2 carried on a carrier 1 at one place of a periphery of the carrier 1, and draws out the wafer 2 to a regulating position from a storing position of at least a magazine 3 by straight advance, is provided with a handler 7 performing handling at an front edge part directed to the side of the magazine 3. The handler 7 has a support part 17 for moving with an orthogonal direction component to the straight advance direction, and the purpose is attained by exerting a energizing means 18 restoring to an original position. COPYRIGHT: (C)2003,JPO