| 摘要 |
PROBLEM TO BE SOLVED: To realize a semiconductor-evaluating apparatus which can extract accurate capacitance value by suppressing errors, even if it is a microscopic capacitance. SOLUTION: The semiconductor-evaluating apparatus comprises a circuit for extracting the capacitance value of a capacitor 8C to be measured, by measuring currents Im and Ir by repeating charging and discharging of the capacitor 8C by alternately turning on and off P-channel MOS transistors 1, 2 and N-channel MOS transistors 3, 4 and having P-channel MOS transistors 5, 6 inserted between output nodes 7A and 7B of the transistors 1, 2 to suppress the direct influence of a pulse signal to be applied to gates of the transistors 1, 2, as a current flowing to the capacitor 8C via a parasitic capacitor between a gate and a drain by applying a gate voltage V3 of a DC potential to the transistors 5, 6. Thus, the accurate capacitance value of small errors can be extracted, even if the capacitance is microscopic. COPYRIGHT: (C)2003,JPO
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