SURFACE MEASURING METHOD AND DEVICE THEREOF

摘要

PROBLEM TO BE SOLVED: To easily measure a plurality of points on the surface of an object to be measured whose surface is formed with a part of a spherical surface. SOLUTION: The mirror finished surface 1a of a spherical mirror 1 is formed with a part of a spherical surface and a back surface 1b of a part of a spherical surface with a center the same as the center of the spherical surface forming the mirror finished surface 1a. A seat 10 with a cylinder shape supports the back surface 1b of the spherical mirror 1 with an upper surface thereof. Reflection factors at a plurality of points on the mirror finished surface 1a of the spherical mirror 1 are measured by supporting different points on the back surface 1b of the spherical mirror 1 with the seat 10. Inspection light from the measuring part 21 of a spectrophotometer 20 is always applied to the mirror finished surface 1a of the spherical mirror 1 at a fixed angle and a distance even if the seat 10 supports any points on the back surface 1b of the spherical mirror 1. Then reflection light from the mirror finished surface 1a of the spherical mirror 1 is always received with the measuring part 21 at the fixed angle and the distance. COPYRIGHT: (C)2003,JPO