发明名称 MOUNT FOR FABRICATING SAMPLE FOR WAFER TEST
摘要 PURPOSE: A mount for fabricating a sample for a wafer test is provided to easily fabricate the sample and eliminate a problem arising from a grinding process in forming the sample by performing a grinding process while the grounding quality is previously set. CONSTITUTION: A frame(20) under which a lengthwise path is formed is prepared. A screw part is formed in the upper portion of a moving stage(40), coupled to the path of the frame and capable of sliding. The moving stage is transferred by a screw(30) that is positioned to rotate on the path of the frame and is coupled to the screw part over the moving stage.
申请公布号 KR20030073946(A) 申请公布日期 2003.09.19
申请号 KR20020013732 申请日期 2002.03.14
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, GYEONG U;YOO, SEON GU
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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