发明名称 |
MOUNT FOR FABRICATING SAMPLE FOR WAFER TEST |
摘要 |
PURPOSE: A mount for fabricating a sample for a wafer test is provided to easily fabricate the sample and eliminate a problem arising from a grinding process in forming the sample by performing a grinding process while the grounding quality is previously set. CONSTITUTION: A frame(20) under which a lengthwise path is formed is prepared. A screw part is formed in the upper portion of a moving stage(40), coupled to the path of the frame and capable of sliding. The moving stage is transferred by a screw(30) that is positioned to rotate on the path of the frame and is coupled to the screw part over the moving stage.
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申请公布号 |
KR20030073946(A) |
申请公布日期 |
2003.09.19 |
申请号 |
KR20020013732 |
申请日期 |
2002.03.14 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, GYEONG U;YOO, SEON GU |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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