PLASMA TREATMENT DEVICE AND METHOD FOR GENERATING PLASMA

摘要

PROBLEM TO BE SOLVED: To reduce reflected power from a slot antenna.

SOLUTION: Radiation power from a slot antenna can be increased as compared with a case where the length L of a slot 26 is increased monotonously from a central part A to the circumferential edge B of an antenna plane 28 by increasing the length L of the slot 26 monotonously in the radial direction from the central part A of the antenna plane 28 up to a maximum length at a first intermediate part C and sustaining the maximum length from the first intermediate part C to the circumferential edge B. Since power left in the slot antenna without being radiated therefrom is reduced, reflected power from the slot antenna is reduced.

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