CONTROL METHOD OF SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent an adverse effect of a process to a substrate during treatment even in the case that the an alarm is issued from a treatment unit. SOLUTION: When one of a plurality of the treatment units issues the alarm informing abnormality, treatment and carrying are continued until a carrying path is completed for the substrate positioned at a downstream side of the alarm issuing unit or a prescribed skip mode applying unit in the carrying path. Carrying is stopped for the substrate positioned an upstream side of the alarm issuing unit or the skip mode applying unit. COPYRIGHT: (C)2003,JPO