FLAT-DIELECTRIC-TYPE PLASMA REACTOR

摘要

PURPOSE: A flat-dielectric-type plasma reactor is provided to reduce the particulate materials and gaseous materials by making streamer discharge and glow discharge coexistent. CONSTITUTION: A flat-dielectric-type plasma reactor(100) has a space by forming a spacer(30) between one dielectric substance(10) and another dielectric substance(20). A discharge electrode(40) having a through hole(41) is prepared in one dielectric substance. An earth electrode panel(21) is prepared in the other dielectric substance. An electric field is formed between the discharge electrode and the earth electrode panel. Upon increasing voltage higher than the voltage applied from glow discharge, streamer discharge is generated and then glow discharge is formed. Thus, the streamer discharge and glow discharge coexist.