APPARATUS AND METHOD FOR DETECTION OF DEFECT

摘要

PROBLEM TO BE SOLVED: To provide a defect detection apparatus by which a defect generated on a sheetlike specimen at a production stage can be time-series-confirmed easily.

SOLUTION: The defect detection apparatus is provided with a first imaging part 1 and a second imaging part 2 used to image the specimen S being conveyed at two production process stages; a first detection part 31 and a second detection part 41 used to detect the defect on the specimen S for each imaging part on the basis of captured image data; a first recognition part 32 and a second recognition part 42 used to specify a corresponding data part in the image data on the other side corresponding to a data part in which a defect by the image data on one side is detected; a first memory part 5 and a second memory part 6 used to store the image data for each imaging part; a defect decision part 7 used to decide whether the detected defect is a defect in the same place on the specimen or not; and a display part 8 used to display the image data containing the detect part decided as the defect in the same place for each imaging part.

COPYRIGHT: (C)2003,JPO