发明名称 LASER OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide structure for decreasing the loss of light in a laser optical device having a homogenizer to uniformize the intensity distribution of a laser beam. SOLUTION: As for a multi-cylindrical lens (glass base plate where many cylindrical lenses are formed) used for the homogenizer, convex cylindrical lenses and concave cylindrical lenses are alternately arranged and structure between the cylindrical lenses is made smooth. In such a way, the scattering of light caused at a boundary part between the cylindrical lenses in the conventional manner is reduced. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003262823(A) 申请公布日期 2003.09.19
申请号 JP20030005353 申请日期 2003.01.14
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 TANAKA KOICHIRO
分类号 G02B27/09;G02B3/00;G02B3/06;H01L21/268;(IPC1-7):G02B27/09 主分类号 G02B27/09
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