| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for efficiently manufacturing a microlens having a hemispherical surface and a microlens array in which the microlenses are arranged in one dimension or in two dimensions at a low cost. SOLUTION: A spherical or hemispherical microlens or a microlens array is manufactured in the following process. An insulating resist which generates swelling property with water by irradiation of radiation is applied on a conductive layer of a substrate to form an insulating layer. After the layer is irradiated with radiation in a specified pattern corresponding to the form and the arranged state of microlenses, the substrate is immersed in an electrodeposition liquid while using the conductive layer of the substrate as one electrode to perform electrodeposition without forming openings by developing the exposed part of the insulating layer. Thus, the electrodeposition resin is made to impregnate the inner part of the insulating layer which generates the swelling property with water by the irradiation of radiation, and further the electrodeposition resin is accumulated on the insulating layer to form an electrodeposition layer, which is hardened. COPYRIGHT: (C)2003,JPO
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