发明名称 SYSTEM AND METHOD FOR MASS FLOW RATIO
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a system for dividing a single mass and flow to more than two secondary mass and flow with a predetermined ratio. <P>SOLUTION: A system for dividing a single mass and flow includes an inlet designed for receiving the single mass and flow and at least two flow lines coupled to the entrance. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive desired flow ratio via a user interface, receive signals indicating measured flows from the flow meters, calculate an actual flow ratio of each flow line, based on the measured flows and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flows passing at least one of the each flow line and supply signals indicating the desired flows to at least one of the valves, if the actual ratios are not equal to the desired ratio. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003263230(A) 申请公布日期 2003.09.19
申请号 JP20020380308 申请日期 2002.12.27
申请人 MKS INSTR INC 发明人 AMBROSINA JESSE;KOTTENSTETTE NICHOLAS;SHAJII ALI
分类号 G01F1/00;G01F1/68;G05D11/13;(IPC1-7):G05D11/13 主分类号 G01F1/00
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