METHOD AND SYSTEM FOR LARGE DIMENSION PROFILE MEASUREMENT

摘要

Apparatus for measurement of large profiles by scanning includes a displacement sensor (4) for a test surface (2) and a displacement sensor (5) for a reference surface (3) that are maintained at a constant distance apart by a negative feedback applied to actuators provided for maintaining the constancy. The mapping of the distance between the two sensors whilst scanning is in progress provides the profile of the test surface.