发明名称 |
Apparatus and method for the production of flexible semiconductor devices |
摘要 |
Apparatus for continuously producing flexible semiconductor devices through deposition of a plurality of semiconductor layers onto a moving flexible substrate by using Plasma Enhanced Chemical Vapor Deposition (PECVD) processing, where at least two successive layers are deposited in the same deposition chamber onto the substrate traveling in opposite directions. Computer program product directly loadable into the internal memory of a digital computer comprising software code portions for determining and controlling all the necessary parameters for the production of flexible semi-conductor devices in a such apparatus when said computer program product is run on a computer. Roll-to-roll method for producing flexible semiconductor devices, wherein a plurality of semiconductor layers are deposited in the same deposition chamber onto a flexible substrate moving in opposite directions. Flexible semiconductor device produced with said method, where the penetration rate of one semiconductor layer into its neighboring layer is remarkably low.
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申请公布号 |
US2003172873(A1) |
申请公布日期 |
2003.09.18 |
申请号 |
US20030370935 |
申请日期 |
2003.02.20 |
申请人 |
FISCHER DIEGO;TORRES PEDRO |
发明人 |
FISCHER DIEGO;TORRES PEDRO |
分类号 |
C23C16/509;C23C16/52;C23C16/54;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/509 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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