STEREOSCOPIC THREE-DIMENSIONAL METROLOGY SYSTEM AND METHOD

摘要

A stereoscopic three-dimensional optical metrology system (100) and method accurately measure the location of physical features (129) on a test article (120) in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article (120) from two or more perspectives through a substantially transparent fiducial plate (190) bearing a fiducial marking (199); camera (111,112) viewing angles and apparent relative distances between a feature on a test article (120) and one or more fiducials (199) may enable accurate calculation of feature position.