发明名称 |
Wafer stage with magnetic bearings |
摘要 |
A high accuracy stage supported in six degrees of freedom by electromagnetic bearings. Movements in the horizontal plane of the stage are supported by variable reluctance actuators which are mounted between the high accuracy stage and a coarse stage so as not to distort the high accuracy stage during movements thereof. The high accuracy stage is supported in three vertical degrees of freedom by electromagnetic actuator devices which are preferably voice coil motors extending between the coarse stage and the high accuracy stage. Additionally, dead weight supports are provided between the coarse stage and the high accuracy stage for vertically supporting the dead weight of the high accuracy stage. The dead weight supports are preferably air bellows.
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申请公布号 |
US2003173833(A1) |
申请公布日期 |
2003.09.18 |
申请号 |
US20020272930 |
申请日期 |
2002.10.18 |
申请人 |
HAZELTON ANDREW J.;EBIHARA AKIMITSU;NOVAK W. THOMAS |
发明人 |
HAZELTON ANDREW J.;EBIHARA AKIMITSU;NOVAK W. THOMAS |
分类号 |
G03F7/20;H01L21/68;H02K41/035;H02N15/00;(IPC1-7):H02K41/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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