发明名称 |
Mode size converter for a planar waveguide |
摘要 |
A process for forming a mode size converter with an out-of-plane taper formed during deposition with a shadow mask is disclosed. Mode-size converters according to the present invention can have any number of configurations. Measured coupling efficiencies for waveguides with mode size converters according to the present invention show marked improvement.
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申请公布号 |
US2003173208(A1) |
申请公布日期 |
2003.09.18 |
申请号 |
US20020101492 |
申请日期 |
2002.03.16 |
申请人 |
PAN TAO;DEMARAY RICHARD E.;CHEN YU;XIE YONG JIN;PETHE RAJIV |
发明人 |
PAN TAO;DEMARAY RICHARD E.;CHEN YU;XIE YONG JIN;PETHE RAJIV |
分类号 |
C23C14/04;G02B6/12;G02B6/122;G02B6/132;(IPC1-7):C23C14/32;C23C16/00 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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