发明名称 METHOD AND RESULTING STRUCTURE FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
摘要 <p>A semiconductor wafer composite is used as a basis for fabricating semiconductor chips, especially compound semiconductor devices. The semiconductor wafer composite advantageously comprises a metallic substrate (210) and multiple semiconductor tiles (220) bonded to the surface of the metallic substrate (210). The semiconductor wafer composite is effectively used as a single large semiconductor wafer for volume fabrication, and can be used to fabricate semiconductor devices in a similar manner.</p>
申请公布号 WO2003077311(P1) 申请公布日期 2003.09.18
申请号 AU2003000298 申请日期 2003.03.13
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