Method for determining the intensity distribution when a laser beam is incident on an object surface whereby laser beam intensity distributions are measured along the beam path and an object shape is determined by interpolation

摘要

Method has the following steps: measurement of laser beam intensity distributions in a number of planes perpendicular to the beam and at knows separations to each other; digitization of the intensity distributions; computer based arrangement and alignment of the distributions according to the plane separations in a 3-D reference system; provision of a 3-D shape of the object surface at least in the beam incidence area and; calculation of an intensity distribution on the object surface using points calculated from the first captured intensity distributions and interpolation. The invention also relates to a corresponding device.