发明名称 Method of forming a field effect transistor using conductive masking material
摘要 The invention includes methods of forming field effect transistors. In one implementation, a method of forming a field effect transistor having a gate comprising a conductive metal or metal compound received over conductively doped semiconductive material includes forming transistor gate semiconductive material into a gate line over a semiconductive material channel region. The gate line includes semiconductive material sidewalls. The semiconductive material sidewalls of the gate line are oxidized. After the oxidizing, at least one of a conductive metal or metal compound is formed in electrical connection with the transistor gate semiconductive material to comprise a substantially coextensive elongated portion of a final construction of the gate line of the field effect transistor being formed.
申请公布号 US7271064(B2) 申请公布日期 2007.09.18
申请号 US20050211915 申请日期 2005.08.24
申请人 发明人
分类号 H01L21/336;H01L21/28;H01L29/788 主分类号 H01L21/336
代理机构 代理人
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