| 摘要 |
<p>An ultrasonic levitation device, comprising a fixed part (1) and a movable part (7) movably installed on the fixed part, wherein thin ultrasonic vibrators (9, 11, 13) formed by stacking piezoelectric elements on each other are installed on the fixed part or the movable part and, for example, floating surfaces are formed, in sloped surfaces (3a, 5a, 9a, 9c), sheet oscillating devices are installed on the fixed part or the movable part through a column member, or the direction of the ultrasonic vibration of the fixed part or the movable part is changed by a vibrating direction changing means, whereby the movable part can be floated through the floating surfaces by the ultrasonic vibration of the fixed part or the movable part.</p> |
