LASER PROCESSING METHOD

摘要

A laser processing method capable of cutting with high precision a work (1) having a variety of laminated structures. A laser beam (L) is applied with a converging point (P) targeted at at least the inside of the substrate of the work (1) consisting of the substrate and a laminated portion provided on the surface (3) of the substrate, thereby forming modified area (7) by multi-phonton absorbing at least the inside of he substrate, and then a cutting start point region (8) by the modified area. The work (1) can be cut with high precision by being cut along this cutting start point region (8).