| 摘要 |
<p>A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet light are arranged in a fashion that renders accumulated birefringence less sensitive to the angular orientation of the beam's rays around the optical axis. A compensating optic corrects a residual radially symmetric component of the birefringence.</p> |
