发明名称 METHOD AND SYSTEM FOR LARGE DIMENSION PROFILE MEASUREMENT
摘要 <p>Apparatus for measurement of large profiles by scanning includes a displacement sensor (4) for a test surface (2) and a displacement sensor (5) for a reference surface (3) that are maintained at a constant distance apart by a negative feedback applied to actuators provided for maintaining the constancy. The mapping of the distance between the two sensors whilst scanning is in progress provides the profile of the test surface.</p>
申请公布号 WO2003076874(P1) 申请公布日期 2003.09.18
申请号 EP2003001547 申请日期 2003.02.14
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