| 摘要 |
In an airtight chamber in an atmosphere under a desired degree of evacuation to be generated by use of a vacuum pump, there are provided an ampoule holder, which can hold at an upright position, a plurality of ampoules with an open upper portion faced upward, a stage for putting the ampoule holder thereon, a melt-sealing unit for the upper portion of each of the ampoules, and a transfer unit, which catches an ampoule held in the ampoule holder, transfers the ampoule to the melt-sealing unit, catches again the ampoule melt-sealed by the melt-sealing unit and transfers the melt-sealed ampoule to the ampoule holder to hold the ampoule therein. The ampoule holder and the stage are made of metal having a good thermal conduction. There is provided a temperature controller for the stage.
|
