METHOD FOR MANUFACTURING SILICON CARBIDE SINTERED COMPACT JIG AND SILICON CARBIDE SINTERED COMPACT JIG MANUFACTURED BY THE METHOD

摘要

A method for manufacturing a silicon carbide sintered compact jig, characterized in that it has (a) a step of dispersing or dissolving a SiC powder or an organic material as a C source into a solvent, to prepare a mixed powder slurry; (b) a step of pouring the mixed powder slurry into a mold and drying it, to form a green compact, (c) a step of subjecting the green compact to calcination at 1500 to 2000ringC under vacuum or in an inert gas atmosphere, to provide a calcinated compact, (d) a step of pre-forming the calcinated compact to prepare a pre-formed article, (e) a step of impregnating the pre-formed article with molten metallic Si by utilizing the capillary action, to thereby react the free carbon in the pre-formed article with the Si absorbed in the pre-formed article, to form a silicon carbide sintered compact, and (f) subjecting the silicon carbide sintered compact to precise working, to manufacture the silicon carbide sintered compact jig; and a silicon carbide sintered compact jig manufactured by the method. The method allows the saving of the time required for manufacturing a silicon carbide sintered compact jig.