RPM control for a vacuum pump system

摘要

Disclosed is a vacuum pump system which, even when a plurality of vacuum pumps are arranged, is capable of preventing a beat and low-frequency vibration by matching the RPM and phases of the rotary member of respective vacuum pumps with each other. Control is performed such that the rotating conditions of the rotary members (103) of the turbo-molecular pump (100B) on the slave side are in synchronism with the rotating condition of the rotary member (103) of the turbo-molecular pump (100A) on the master side. Alternatively, control is performed such that the rotating conditions of the rotary members (103) detected by the turbo-molecular pump (100) are in synchronism with a rotation synchronous signal (501) output from the synchronous operation controller (500).