发明名称 |
METHOD FOR PRODUCING A SOLID BODY COMPRISING A MICROSTRUCTURE |
摘要 |
According to a method for producing a solid body ( 1 ) including a microstructure ( 2 ), the surface of a substrate ( 3 ) is provided with a masking layer ( 6 ) that is impermeable to a substance to be applied. The substance is then incorporated into the substrate regions not covered by the masking layer ( 6 ). A heat treatment is used to diffuse the substance into a substrate region covered by the masking layer ( 6 ) such that a concentration gradient of the substance is created in the substrate region covered by the masking layer ( 6 ), proceeding from the edge of the masking layer ( 6 ) inward with increasing distance from the edge. The masking layer ( 6 ) is then removed to expose the substrate region under this layer, and a near-surface layer of the substrate ( 3 ) in the exposed substrate region is converted by a chemical conversion reaction into a coating ( 9 ) which has a layer thickness profile corresponding to the concentration gradient of the substance contained in this near-surface layer. A supplementary treatment is implemented in a subsection of the coating ( 9 ) in which the thickness of the coating ( 9 ) is reduced. |
申请公布号 |
EP1344245(A1) |
申请公布日期 |
2003.09.17 |
申请号 |
EP20000991238 |
申请日期 |
2000.12.21 |
申请人 |
MICRONAS GMBH |
发明人 |
IGEL, GUENTER;LEHMANN, MIRKO |
分类号 |
H01L21/033;H01L21/308;H01L21/336;H01L21/60;H01L21/768;H01L29/10 |
主分类号 |
H01L21/033 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|