| 摘要 |
PROBLEM TO BE SOLVED: To provide a plurality of slits with a width not longer than 0.15 mm using a grinding wheel with a thickness of 0.01 to 0.1 mm in a surface of work made of a silicon bar and cemented carbide of a directional antenna member or a die member forming an electronic equipment component such as a connector. SOLUTION: The work 2 made of metal or silicon substrate is fixed onto a reciprocating table 4 of a molding/grinding device 1 where vertical feeding and longitudinal feeding of a grinding wheel shaft are numerically controlled. A diamond grain electrocasting metal bond wheel 3 with a thickness of 0.01 to 0.1 mm disposed in the grinding wheel shaft is rotated at 2500 to 4000 min<SP>-1</SP>(circumferential speed V2 of the work surface is 15 to 45 m/s), a notching speed V1 in the orthogonal direction to the work surface is 0.01 to 1 mm/min, the reciprocating table is inverted at a high inverting speed of 180 to 400 strokes/ min (table feed speed V3 is 3 to 8 m/min), and a groove with a width not greater than 0.15 mm is formed in the work. COPYRIGHT: (C)2003,JPO
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