发明名称 |
Fringe analysis method and apparatus using Fourier transform |
摘要 |
In a fringe analysis method using Fourier transform, fringe image data is determined in a state where a wavefront from an object and a wavefront from a reference are relatively inclined with respect to each other by a minute amount, and a carrier fringe occurring due to this inclination is superposed on a fringe occurring due to wavefront information of the object. The inclination is set such that the carrier frequency occurring due to the inclination is a predetermined multiple of the basic frequency determined by the wavefront information of the object and observing means.
|
申请公布号 |
US6621579(B2) |
申请公布日期 |
2003.09.16 |
申请号 |
US20010816113 |
申请日期 |
2001.03.26 |
申请人 |
FUJI PHOTO OPTICAL CO., LTD. |
发明人 |
GE ZONGTAO |
分类号 |
G01B9/02;G01J9/02;(IPC1-7):G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|