摘要 |
PROBLEM TO BE SOLVED: To provide a purification method for producing a copper-basedβ- diketone liquid complex, especially the copper-basedβ-diketone liquid complex suitable for uses based on chemical gas phase growths in the electronic industry. SOLUTION: In a basic method for producing the copper-based complex, a reactive copper compound is reacted with a fluorinatedβ-diketone and an olefinic or acetylenic unsaturated bond-having compound. The reaction product is brought into contact with deoxidized water doubly subjected to a deionization treatment, preferably with an acid-water solution to purify the reaction product. Thus, the aqueous phase containing by-products and the organic phase containing the monovalent copper complex of theβ-diketone are formed, and the aqueous phase is separated from the organic phase. The monovalent copper complex of theβ-diketone is then recovered. COPYRIGHT: (C)2003,JPO
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